通知预告
【20171017-20】14th PBII&D conference
发布日期:2017-06-02
2017年10月17-20日,第十四届等离子体离子注入&沉积国际会议将在上海硅酸盐研究所召开。会议主席为刘宣勇研究员。会议主题包括:
- Plasma Based Ion Implantation and Deposition
- IBAD; Vacuum Arc & Hybrid Processes
- Pulsed Power Deposition (HIPIMS)
- Plasma/Ion Sources; Pulsed Power and PBII Systems
- Plasma Diagnotics/Modeling
- Plasma/Ion-Surface Interaction
- Functional Materials and Interfaces (Biomaterials, DLC, Nanostructures, Semiconductors, etc.)
- Industrial Applications, Scaling Issues
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